Book 1993

Electron Beam Testing Technology

Publisher: Springer US
Language: English
Published: 1993

Computer engineering
Condensed Matter Physics
Spectroscopy and Microscopy
Optical and Electronic Materials
Optical materials
Solid State Physics
Electrical Engineering
Crystallography

This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the technology.